SEMI标准软件培训

我们为珂矽的SDK产品客户提供定制化的SEMI标准软件培训,可供选择的标准包括:

I. SECS/GEM 系列

  1. 协议层:SEMI E4 (SECS-I) , E37(HSMS);
  2. 消息及数据层: E5 (SECS-II);
  3. 行为和场景: E30 (GEM);

II. GEM300 系列

  1. E40 (Process Job Management);
  2. E94 (Control Job Management);
  3. E87 (Carrier Management);
  4. E90 (Substrate Tracking);
  5. E116 (Equipment Performance Tracking);
  6. E157 (Module Processing Tracking).

III. Interface A/EDA 系列

  1. E120 (Commone Equipment Module);
  2. E125 (Equipment Self-Description);
  3. E132 (Client Authentication and Authorization);
  4. E134 (Data Collection Management);
  5. E164 (EDA Common Metadata);
  6. E179 (Protocol Buffers Common Components);

IV. Engergy Saving: 节能系列

  1. E167 (Specification for Equipment Energy Saving Mode Communications);
  2. E172 (Specification for Subsystem Energy Saving Mode Communication);

IV. 其他:

  1. PV2 (Guide For PV Equipment Communication Interfaces);
  2. HB4 (Specification of Communication Interfaces For High Brightness LED Manufacturing Equipment);
  3. HB13(Specification Of Susceptor For HB-LED MOCVD Equipment Communication Interface)
  4. A3 (Specification For Printed Circuit Board Equipment Communication Interfaces )

如果您想更进一步了解SEMI软件标准细节,请通过邮件support@kxware.com和我们取得联系。