SEMI标准软件培训
我们为珂矽的SDK产品客户提供定制化的SEMI标准软件培训,可供选择的标准包括:
I. SECS/GEM 系列
- 协议层:SEMI E4 (SECS-I) , E37(HSMS);
- 消息及数据层: E5 (SECS-II);
- 行为和场景: E30 (GEM);
II. GEM300 系列
- E40 (Process Job Management);
- E94 (Control Job Management);
- E87 (Carrier Management);
- E90 (Substrate Tracking);
- E116 (Equipment Performance Tracking);
- E157 (Module Processing Tracking).
III. Interface A/EDA 系列
- E120 (Commone Equipment Module);
- E125 (Equipment Self-Description);
- E132 (Client Authentication and Authorization);
- E134 (Data Collection Management);
- E164 (EDA Common Metadata);
- E179 (Protocol Buffers Common Components);
IV. Engergy Saving: 节能系列
- E167 (Specification for Equipment Energy Saving Mode Communications);
- E172 (Specification for Subsystem Energy Saving Mode Communication);
IV. 其他:
- PV2 (Guide For PV Equipment Communication Interfaces);
- HB4 (Specification of Communication Interfaces For High Brightness LED Manufacturing Equipment);
- HB13(Specification Of Susceptor For HB-LED MOCVD Equipment Communication Interface)
- A3 (Specification For Printed Circuit Board Equipment Communication Interfaces )
如果您想更进一步了解SEMI软件标准细节,请通过邮件support@kxware.com和我们取得联系。