Kxware Tool Master (KTM)
With the rapid development of semiconductor industry, the demand for semiconductor equipment control software platforms is increasing. The KTM semiconductor equipment control software platform is a software system integrating advanced control algorithms, data processing, user interface, and network communication technologies, designed to provide efficient, stable, and intelligent control solutions for semiconductor manufacturing equipment.
1. High Integration
KTM platform adopts a modular design, supports multiple semiconductor equipment types, and achieves precise process control through various control algorithms.
2. Real-time Data Processing
The platform is able to collect, analyze, and process equipment data in real time. Through real-time monitoring and data analysis, it can promptly detect equipment anomalies, thereby improving equipment operating efficiency and product quality.
3. User-friendly User Interface
We prioritize user experience, providing a simple and intuitive user interface that conforms to SEMI E95 standards. Users can easily configure process parameters, view equipment status, perform fault diagnosis and maintenance, reducing operational complexity and improving work efficiency.
4. Offers Multiple Process Control Methods
- Process control engine based on host PC (IPC control)
- Process control engine based on slave controller (PLC, RTOS)
- Process control engine based on dual host PC and slave controller (Hybrid Control)
5. Extensive Data Recording And Diagnostics
- Real-time acquisition of equipment data
- Supports data storage, querying, and exporting functions
- Provides data analysis application such as trend charts and histograms
- Multiple forms of log recording and historical querying
6. Provides Various Hardware Libraries
Refer to the following link to view the list of currently supported hardware driver libraries:
7. Fully Compliant with SECS/GEM, GEM300, EDA (Interface-A) SEMI Standards
【SECS/GEM SEMI Standards】
- SEMI E5 – SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
- SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
- SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services
【GEM300 SEMI Standards】
- SEMI E39 – Specification for Object Services: Concepts, Behavior, and Services (OSS)
- SEMI E40 – Specification for Processing Management
- SEMI E87 – Specification for Carrier Management (CMS)
- SEMI E90 – Specification for Substrate Tracking
- SEMI E94 – Specification for Control Job Management
- SEMI E116 – Specification for Equipment Performance Tracking
【Interface A SEMI Standards】
- SEMI E120 – Specification for the Common Equipment Model (CEM)
- SEMI E125 – Specification for Equipment Self Description (EqSD)
- SEMI E132 – Specification for Client Authentication & Authorization
- SEMI E134 – Specification for Data Collection Management
【Other SEMI Standards】
- SEMI E84 – Specification for Enhanced Carrier Handoff Parallel I/O Interface
- SEMI E95 – Specification for Human Interface for Semiconductor Manufacturing Equipment
- SEMI E157 – Specification for Module Process Tracking
- SEMI E172 – Specification for SECS Equipment Data Dictionary (SEDD)
- SEMI E128 – Specification For XML Message Structures
- SEMI E138 – XML Semiconductor Common Components
- SEMI E164 – Specification for EDA Common Metadata
- SEMI E167 – Specification for Equipment Energy Saving Mode Communication (EESM)
- SEMI E175 – Specification for Subsystem Energy Saving Mode Communication (SESMC)
8. Application Scenarios
KTM is suitable for various semiconductor equipment, such as etching equipment, cleaning equipment, furnace equipment, wafer slitting equipment, electroless plating equipment, ion implanters, and thin film deposition equipment. Customer equipment is integrated into various front-end, back-end, and packaging/testing factories across China, achieving automated production through SEMI standards such as SECS/GEM, GEM300, and Interface-A, which connect to the factory’s CIM system.
9. Service and Support
We provide comprehensive after-sales service and technical support, including:
- Online technical support via WeChat
- Regular software upgrades and maintenance
- Customized development and technical consultation
- Assistance in analyzing and resolving software issues
- Software development training and project development guidance
KTM is dedicated to providing OEMs with efficient, stable, and intelligent software control platform solution. We continuously pursue technological innovation to contribute to the development of semiconductor industry. For further product details or customized development needs, please contact sales@kxware.com.