KXGEM300 SDK provides a complete implementation of the SEMI GEM300 standards
- Object Services Strandard (E39 OSS）
- Specification For Substrate Tracking (E90 STS)
- Standard For Processing Management (E40 PJM)
- Specification For Control Job Management (E94 CJM)
- Specification For Equipment Performance Tracking (E116 EPT)
- Specification For Carrier Management (E87 CRM)
- Specification For Enhanced Carrier Handoff Parallel I/O Interface (E84 AMHS)
- Specification For Module Process Tracking (E157 MPT)
Which type of equipment is suitable to use the KXGEM300 SDK?
Equipment manufacturers already have their own equipment control software and hope to modify their software to meet the GEM300 standard with less R&D cost in a shorter time. We provide customize KXGEM300 integration training for each customer. Using the customer’s actual equipment as examples to do integration of various GEM300 SEMI standards during the training lessions.
KXGEM300 enables equipment manufacturers’ software developers to develop GEM300 specifications and EAP interfaces that meet the requirements in factories without needing to be proficient in GEM300 standards.
Based on the KXGEM300 SDK, Kxware team has assisted multiple OEMs in completing GEM300 software integration, including single-wafer process tool, batch tool, internal buffer tool, wafer packaging tool, and metrology tool, etc. Equipment running KXGEM300 is already proved in leading factories in China.